Title:
パターン形成方法
Document Type and Number:
Japanese Patent JP5780222
Kind Code:
B2
Inventors:
Jun Hatakeyama
Kazuhiro Katayama
Koji Hasegawa
Kazuhiro Katayama
Koji Hasegawa
Application Number:
JP2012194757A
Publication Date:
September 16, 2015
Filing Date:
September 05, 2012
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/038; G03F7/004; G03F7/039; G03F7/32
Domestic Patent References:
| JP2008058878A | ||||
| JP2003330194A | ||||
| JP2004102019A | ||||
| JP2009080482A | ||||
| JP2006221019A |
Foreign References:
| US4720445 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa