To provide a pattern forming method and apparatus capable of suppressing the occurrence of pattern blurring when forming a pattern on a substrate by a sputtering method, a piezoelectric vibrator, a method of manufacturing the piezoelectric vibrator, an oscillator, an electronic apparatus and a radio-controlled clock.
There is provided the pattern forming method for forming the pattern on the substrate 40 by a sputtering method in a deposition chamber 85. The deposition chamber includes a table 86 configured to be able to dispose a plurality of substrates thereon and a target 88 which serves as a raw material of the pattern. The method includes the steps of: placing a masking material having openings corresponding to the pattern on the surface of the substrate; moving the plurality of substrates into the deposition chamber, so that the plurality of substrates are disposed on the table; rotating the table so that the surface of the substrate passes a position facing the target; and making one substrate pass the position facing the target several times to form the pattern on the surface of the substrate.
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Noriaki Uchino
Nobuyuki Kimura
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