Title:
PATTERN MEASUREMENT SYSTEM, METHOD FOR MEASUREMENT PATTERN, AND PROGRAM
Document Type and Number:
Japanese Patent JP2022112303
Kind Code:
A
Abstract:
To propose a technique that can precisely detect a random noise component without being restricted by a measurement pattern and also can allow a more precise edge roughness measurement.SOLUTION: According to the present disclosure, a left edge and a right edge of a line pattern are subjected to a pattern matching and an edge position correction in an acquired line pattern image so that a roughness-free image is generated. A PSD value is measured from the image and an average PSD value of the total frequency is used as a random noise component so that a random noise component can be precisely detected. Further, the PSD value (the random noise component) is subtracted from the PSD value of an original image so that the edge roughness is measured precisely.SELECTED DRAWING: Figure 8
Inventors:
KAMEDA TOSHIMASA
SAKAI KEI
TSUNODA JUNICHI
SAKAI KEI
TSUNODA JUNICHI
Application Number:
JP2021008075A
Publication Date:
August 02, 2022
Filing Date:
January 21, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
G01B15/00; G01B15/04; H01L21/66
Attorney, Agent or Firm:
Hiraki International Patent Office