Title:
パターン転写装置およびパターン転写方法
Document Type and Number:
Japanese Patent JP6621448
Kind Code:
B2
Inventors:
Tomoaki Sato
Mitsuaki Serizawa
Mitsuaki Serizawa
Application Number:
JP2017146838A
Publication Date:
December 18, 2019
Filing Date:
July 28, 2017
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B29C59/04; B41F16/00; B41F33/00
Domestic Patent References:
| JP2011148180A | ||||
| JP57053316U | ||||
| JP2007264184A |
Attorney, Agent or Firm:
Suzue International Patent Office