Title:
PEELING DEVICE OF PLATE-LIKE BODY AND METHOD THEREOF, AND METHOD OF MANUFACTURING PLATE-LIKE BODY
Document Type and Number:
Japanese Patent JP2015198221
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a peeling device of a plate-like body capable of effectively peeling the plate-like body from a plate-like body holding member and a method thereof, and a method of manufacturing the plate-like body.SOLUTION: In a first peeling process, a fluid 16 is injected from a nozzle 14 and an edge portion G3 of a glass plate G is peeled from a holding surface 12 of an adsorption sheet 10. An injection direction of the fluid 16 is a direction pointed to a holding surface 12A at a position separated from a boundary portion 22 between the holding surface 12 and the edge portion G3, and is set to a direction intersecting the holding surface 12. In a second peeling process, the injection of the fluid 16 is stopped first. Then fluid 20 is injected from a nozzle 18 and the entire glass plate G is peeled from the holding surface 12. An injection direction of the fluid 20 is a direction pointed to a boundary face 24 between the holding surface 12 and the glass plate G, and is set to a direction parallel to the holding surface 12.
Inventors:
TSUJI SATOSHI
TAKEMURA KEI
TANAKA RYOSUKE
KATO KEISUKE
YAMAMOTO KAZUYOSHI
TAKEMURA KEI
TANAKA RYOSUKE
KATO KEISUKE
YAMAMOTO KAZUYOSHI
Application Number:
JP2014077002A
Publication Date:
November 09, 2015
Filing Date:
April 03, 2014
Export Citation:
Assignee:
ASAHI GLASS CO LTD
International Classes:
H01L21/683; B24B41/06
Attorney, Agent or Firm:
Kenzo Matsuura
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