Title:
PELLICLE FOR EUV
Document Type and Number:
Japanese Patent JP2014049677
Kind Code:
A
Abstract:
To provide a pellicle for EUV which can mitigate reduction of incident EUV light, while having a high intensity.
A pellicle for EUV has an EUV permeable film reinforced by a structure of mesh shape. The structure of mesh shape has a vertical cross-sectional shape (cross-sectional shape in the height direction) which tapers with increasing distance from the EUV permeable film.
Inventors:
YAMADA MOTOYUKI
AKIYAMA SHOJI
AKIYAMA SHOJI
Application Number:
JP2012193082A
Publication Date:
March 17, 2014
Filing Date:
September 03, 2012
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
H01L21/027; G03F1/64
Domestic Patent References:
| JP2008304840A | 2008-12-18 | |||
| JP2005043895A | 2005-02-17 | |||
| JP2010256434A | 2010-11-11 | |||
| JP2002139826A | 2002-05-17 | |||
| JP2008304840A | 2008-12-18 | |||
| JP2005043895A | 2005-02-17 |
Attorney, Agent or Firm:
Kiyoaki Takita
Nakamura Narumi
Iwasakizaki Ario
Nakamura Narumi
Iwasakizaki Ario