PURPOSE: To realize a performance test method for which twice performance tests are not required even when a detective part found by the performance test is substituted with a redundant circuit in the performance test method for a semiconductor device with the redundant circuit and a semiconductor device with the redundant circuit.
CONSTITUTION: This method is a performance test method by which a semiconductor device having a normal circuit 1 and a redundant circuit 2 is operated in trial, and constituted so that operation in the trial is performed for the redundant circuit 2, as well in the performance test method of the semiconductor device by which substitute process substituting a defective part with the redundant circuit 2 is performed after the performance test.