Title:
A Pericle frame and a manufacturing method for the same, and Pericle
Document Type and Number:
Japanese Patent JP6008784
Kind Code:
B2
Abstract:
A pellicle is proposed in which the frame is made of an aluminum alloy and at least the inner wall of the frame is entirely coated with a pure aluminum layer, which preferably has a purity of 99.7% or higher and a thickness of 3 through 50 micrometers; the pellicle frame with the pure aluminum layer may be subjected to anodic oxidation treatment, electric coloring, and void filling, and a resin layer can be formed as the outermost layer.
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Inventors:
Kazutoshi Sekihara
Application Number:
JP2013084498A
Publication Date:
October 19, 2016
Filing Date:
April 15, 2013
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F1/64
Domestic Patent References:
| JP4605305B2 | ||||
| JP8319573A | ||||
| JP2006184704A | ||||
| JP2011076037A | ||||
| JP2012159671A | ||||
| JP7072617A | ||||
| JP2012068667A | ||||
| JP2012201891A | ||||
| JP2012056274A |
Foreign References:
| US20100273097 | ||||
| US20110063601 |
Attorney, Agent or Firm:
Yukio Numazawa
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