Title:
ペロブスカイト型酸化物積層体及び圧電素子、液体吐出装置
Document Type and Number:
Japanese Patent JP4931148
Kind Code:
B2
Abstract:
A perovskite-oxide lamination constituted by a substrate and one or tore first films of a first oxide of a perovskite type and one or more second films of a second oxide which are alternately formed over the substrate. The first oxide has a composition expressed as ABO3, the second oxide has a composition expressed as CDO3, each of A and C represents one or more A-site elements which are one or more metal elements, each of B and D represents one or more B-site elements which are one or more metal elements, O represents oxygen, and the second oxide is unable to be formed to have a perovskite crystal structure at normal pressure without a thickness limitation. The one or more first films and the one or more second films may contain inevitable impurities.
Inventors:
Hiroyuki Kobayashi
Yukio Sakashita
Ben Sasaki
Yukio Sakashita
Ben Sasaki
Application Number:
JP2007258464A
Publication Date:
May 16, 2012
Filing Date:
October 02, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
C30B29/24; B32B18/00; B41J2/14; B41J2/16; C01G29/00; C01G49/00; C30B23/02; H01L41/09; H01L41/187
Domestic Patent References:
| JP6239696A | ||||
| JP6234520A | ||||
| JP2007088445A | ||||
| JP2007194429A | ||||
| JP2008195603A |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma