Title:
位相ずれ量測定装置及び位相ずれ量測定方法並びに位相シフトマスクの製造方法
Document Type and Number:
Japanese Patent JP4500908
Kind Code:
B2
Inventors:
Haruhiko Kususe
Koji Miyazaki
Koji Miyazaki
Application Number:
JP2003318278A
Publication Date:
July 14, 2010
Filing Date:
September 10, 2003
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
G01J9/02; G01M11/00; G03F1/26; G03F1/68; G03F1/72; G03F1/84; G03F1/86
Domestic Patent References:
| JP10062258A | ||||
| JP7159978A | ||||
| JP2000292352A | ||||
| JP8110266A | ||||
| JP5204134A |
Attorney, Agent or Firm:
Ken Ieiri