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Title:
PHOTO SENSITIVE RESIN COMPOSITION
Document Type and Number:
Japanese Patent JP2002139831
Kind Code:
A
Abstract:

To provide a photosensitive resin composition capable of practically ensuring both high film leaving property and high sensitivity independently of the amount of a quinonediazido-containing photosensitive agent used, having low process dependence and capable of forming a good pattern.

In the photosensitive resin composition containing an alkali- soluble resin and a quinonediazido-containing photosensitive agent, the photosensitive agent comprises a mixture of two or more esterified products of tetrahydroxybenzophenone and 1,2-naphthoquinonediazidosulfonic acid different from each other is average esterification rate. The photosensitive agent is preferably a mixture of a photosensitive agent A comprising an esterified product of tetrahydroxybenzophenone and 1,2-naphtohquinonediazido-5-sulfonic acid having X% (50≤X≤100) average esterification rate and a photosensitive agent B comprising a similar esterified product having Y% (25≤Y≤(X-10)) average esterification rate and the mixing ratio of A:B is preferably (10-90):(90-10).


Inventors:
TAKAHASHI SHUICHI
IKEMOTO JUN
SHIODA HIDEKAZU
KAWATO SHUNJI
Application Number:
JP2000331811A
Publication Date:
May 17, 2002
Filing Date:
October 31, 2000
Export Citation:
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Assignee:
CLARIANT JAPAN KK
International Classes:
C08K5/07; C08K5/42; C08L101/00; G03F7/022; G03F7/023; H01L21/027; (IPC1-7): G03F7/022; C08K5/07; C08K5/42; C08L101/00; G03F7/023; H01L21/027
Attorney, Agent or Firm:
Hiroki Kanao (1 person outside)