Title:
光硬化性樹脂組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP5275596
Kind Code:
B2
Inventors:
Uematsu Teruhiro
Ryoma Mizusawa
Ryoma Mizusawa
Application Number:
JP2007223661A
Publication Date:
August 28, 2013
Filing Date:
August 30, 2007
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/031; G03F7/029; G03F7/038; H01B13/00; H01J9/02; H01J11/22; H01J11/34
Domestic Patent References:
| JP2005174778A | ||||
| JP2005258398A | ||||
| JP2005274920A | ||||
| JP2011026384A | ||||
| JP2006276791A | ||||
| JP2003280195A |
Attorney, Agent or Firm:
Masayuki Masabayashi