Title:
光検出装置
Document Type and Number:
Japanese Patent JP6632647
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a light detection device which can be downsized.SOLUTION: A spectral sensor 1 is equipped with a mounting substrate, a light detector 3, a spacer 4, and Fabry-Perot interference filter 10. The spacer 4 supports the Fabry-Perot interference filter 10, and the spacer 4 forms an opening portion A1 communicating with an inside of a peripheral area R1 and an outside of the peripheral area R1. The Fabry-Perot interference filter 10 has a supporting body, a first mirror 31, and a second mirror 41 capable of moving with respect to the first mirror 31. The spacer 4 and the Fabry-Perot interference filter 10 are fixed to each other by die bond resin 5 formed by a resin material. A thickness of a cavity S in a direction in which the first mirror 31 and the second mirror 41 face each other is smaller than a thickness of the supporting body of the Fabry-Perot interference filter 10.SELECTED DRAWING: Figure 1
Inventors:
Katsumi Shibayama
Takashi Kasahara
Hirose Maki
Toshimitsu Kawai
Takashi Kasahara
Hirose Maki
Toshimitsu Kawai
Application Number:
JP2018020885A
Publication Date:
January 22, 2020
Filing Date:
February 08, 2018
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01J3/26; G01J3/36; G02B5/28; H01L31/02; H01L31/0232
Domestic Patent References:
| JP2012127917A | ||||
| JP2009204381A | ||||
| JP2006194791A | ||||
| JP2008197361A | ||||
| JP2011117884A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Hideki Komatsu
Yoshiki Kuroki
Kenichi Shibayama
Hideki Komatsu