PURPOSE: To enable a photoelectric conversion device to be lessened in dimensions and cost without deteriorating in performance by a method wherein a photoelectric conversion section is formed of a laminated structure composed of a conductive layer, an insulating layer, and a semiconductor layer.

CONSTITUTION: A storage capacitor section composed of a first electrode 1, a first insulating layer 2, and a second electrode 3, a second insulating layer 4, a semiconductor layer 5, and a photoelectric conversion element section A, a TFT section B, and a matrix section C are formed on a substrate 10 through the same process. A resist pattern is formed through photolithography, and an N+ layer 6, a semiconductor layer 7, and the second insulating layer 4 are partially removed to enable elements to be independently separated. As mentioned above, a photoelectric conversion section and a charge storage section are formed in laminated structures, and the charge storage section is removed. By this setup, a photoelectric conversion device can be miniaturized and lessened in cost.