Title:
PHOTOELECTRIC CONVERSION ELEMENT AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2015185587
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a photoelectric conversion element capable of improving performance and reliability than the prior art and to provide a manufacturing method of the same.SOLUTION: The photoelectric conversion element includes: a first irregularity 8 and a second irregularity 9 provided on one surface of a semiconductor substrate 1; a first i-type semiconductor film 2 and a first conductive type semiconductor film 3 provided on the first irregularity 8; a second i-type semiconductor film 4 and a second conductive type semiconductor film 5 provided on the second irregularity 9; an electrode layer 11 for a first conductive type provided on the first conductive type semiconductor film 3; and an electrode 12 for a second conductive type provided on the second conductive type semiconductor film 5. The first irregularity 8 and the second irregularity 9 are different in shape.
Inventors:
MATSUMOTO YUTA
HIEDA TAKESHI
KAMIKAWA TAKESHI
KIMOTO KENJI
HIEDA TAKESHI
KAMIKAWA TAKESHI
KIMOTO KENJI
Application Number:
JP2014058644A
Publication Date:
October 22, 2015
Filing Date:
March 20, 2014
Export Citation:
Assignee:
SHARP KK
International Classes:
H01L31/0236; H01L31/0747
Attorney, Agent or Firm:
Fukami patent office