Title:
PHOTOIRRADIATING TYPE HEAT-TREATING DEVICE
Document Type and Number:
Japanese Patent JP3733811
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent devitrification of the light emitting sections of a plurality of one-end sealed lamps, even when the inputs of the lamps are increased for increasing the temperature rising rate of a wafer, by surely cooling the light emitting sections of the lamps by installing a supply air path which cools the lamps and an exhaust path to a mirror in which the lamps are arranged.
SOLUTION: A supply air path 14 which cools a plurality of lamps 10 having sealed one ends and an exhaust path 15 which discharges air from the periphery of the lamps 10 are installed to a mirror 11, in which the lamps 10 are arranged perpendicularly to a wafer 3. When the lamps 10 are turned on, the lamps 10 are cooled with cooling air supplied to the supply air path 14 from a cooling fan. The cooling air flowing in the periphery of the lamps 10 from the supply air path 14 advances along the periphery of the light emitting sections of the lamps 10 from the sealed sections of the lamps 10. A negative pressure is supplied to the exhaust path 15 from an exhaust fan so as to suck air to the path 15 and forcibly discharges the sucked air. Therefore, the light emitting sections of the lamps 10 can be cooled directly with high efficiency.
Inventors:
Shinji Suzuki
Yoshiki Mimura
Yoshiki Mimura
Application Number:
JP31182899A
Publication Date:
January 11, 2006
Filing Date:
November 02, 1999
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/22; H01L21/26; F21V29/00; F21V29/505; H01L21/31; H01L21/324; H05B3/00; (IPC1-7): H01L21/26; H01L21/22; H01L21/31; //F21V7/20; F21V29/00
Domestic Patent References:
| JP10144619A | ||||
| JP3218624A |
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