Title:
PHOTOLITHOGRAPHIC ETCHING METHOD FOR MANUFACTURING WIRE SCREEN DISK FOR REGENERATOR OF CRYOGENIC COOLER
Document Type and Number:
Japanese Patent JPH06221701
Kind Code:
A
Abstract:
PURPOSE: To provide a photolithographic etching method for accurately and uniformly manufacturing a wire screen disk having a different composite configuration size for use in a regenerator of a cryogenic cooler.
CONSTITUTION: This photolithographic etching method comprises processes wherein a photoresist is applied on a wire screen sheet 18, and the photoresist is developed into one or more of desired disk configurations, and further the developed wire screen sheet 18 is etched to form the wire screen disk 10. The present method is usable for manufacturing a wire screen disk having various composite configuration sizes, thus allowing for the construction of cryogenic cooler having a complicated but more efficient configuration.
Inventors:
UIRIAMU DABURIYUU BAATO
Application Number:
JP27368093A
Publication Date:
August 12, 1994
Filing Date:
November 01, 1993
Export Citation:
Assignee:
TRW INC
International Classes:
F25B9/00; C23F1/00; C23F1/02; G03F7/26; (IPC1-7): F25B9/00; G03F7/26
Attorney, Agent or Firm:
Minoru Nakamura (6 outside)