Title:
PHOTOMASK CORRECTING DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP3042155
Kind Code:
B2
Abstract:
PURPOSE: To eliminate and correct a residual defect without damaging the surface of a glass substrate.
CONSTITUTION: A control signal 6 instructs the lighting of the flash lamp of a laser light source 1 with a flash trigger signal 101, and the operation of the Q-switch of the laser light source 1 with a Q-switch trigger signal 102, and controls the charging voltage of the flash lamp with an output control signal 103. The control part 6 controls a laser power source 1b so as to emit the laser pulse 100 of energy E2 smaller than energy E1 first emitted from the laser head la.
Inventors:
Youichi Yoshino
Application Number:
JP8340892A
Publication Date:
May 15, 2000
Filing Date:
March 05, 1992
Export Citation:
Assignee:
NEC
International Classes:
B23K26/00; B23K26/351; B23K26/361; G03F1/72; G03F7/20; H01L21/027; (IPC1-7): G03F1/08; H01L21/027
Domestic Patent References:
| JP56162748A | ||||
| JP6114640A | ||||
| JP1219751A | ||||
| JP297945A |
Attorney, Agent or Firm:
▲柳▼川 信
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