PURPOSE: To facilitate the replacement of a pericle film and to eliminate soil due to an adhesive by permitting the magnetic force of a magnetic part provided around a circuit pattern in a photomask main body to maintain the frame of the pericle film.

CONSTITUTION: The magnetic part (reticle part) 4 is provided around the circuit pattern 3 in the photomask main body 1. The magnetic force of the magnetic part 4 maintains the pericle frame 5 to which the pericle film (transparent film) 6 covering the circuit pattern 3 is expanded. Unlike a conventional method that a frame is stuck with an adhesive tape, the replacement of the new pellicle film 6 is facilitated. Besides to that, the soil of the circuit pattern 3, which the adhesive causes, can be prevented.