光酸発生剤のブレンドを含むフォトレジスト組成物

Title:

光酸発生剤のブレンドを含むフォトレジスト組成物

Document Type and Number:

Japanese Patent JP5810139

Kind Code:

B2

Abstract:

The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size.

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Inventors:

James F Cameron
James Michael Mori
George W. Ausla
James W. Sackray

Application Number:

JP2013166405A

Publication Date:

November 11, 2015

Filing Date:

August 09, 2013

Export Citation:

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