Title:
スプレー塗布用ホトレジスト組成物および積層体
Document Type and Number:
Japanese Patent JP4717612
Kind Code:
B2
Inventors:
Masaki Saki
Koichi Misumi
Koji Saito
Koichi Misumi
Koji Saito
Application Number:
JP2005342245A
Publication Date:
July 06, 2011
Filing Date:
November 28, 2005
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; B05D1/02; B05D7/24; G03F7/039; G03F7/16
Domestic Patent References:
| JP11218927A | ||||
| JP2005292776A | ||||
| JP2005234178A | ||||
| JP7104464A | ||||
| JP2005019560A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai