Title:
PHOTORESIST SUPPLY DEVICE
Document Type and Number:
Japanese Patent JP3174912
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a photoresist supply device, wherein a photoresist solution inside a container can be used up completely, impurities in a photoresist solution can be removed completely and the service life of a filter is improved.
SOLUTION: This photoresist supply device supplies a photoresist 11 through pressurization by an inert gas 16. The photoresist supply device has a photoresist storage container 12, with a supply end 23 at the lowermost position and a filter 21, which is connected to the supply end 23 of the photoresist storage container 12 and removes impurities of the photoresist 11, which is supplied by making the pressure of the inert gas 16 act on the photoresist storage container 12.
Inventors:
Ping Mizuhiro
Application Number:
JP27652699A
Publication Date:
June 11, 2001
Filing Date:
September 29, 1999
Export Citation:
Assignee:
Winbond Electronics Corp.
International Classes:
B05C11/10; B67D7/02; F04F1/14; G03F7/16; H01L21/027; B67D1/00; (IPC1-7): H01L21/027; B05C11/10; G03F7/16
Domestic Patent References:
| JP346222A | ||||
| JP5138101A | ||||
| JP61294822A | ||||
| JP5267149A | ||||
| JP61268396A | ||||
| JP11156385A | ||||
| JP6220606U |
Attorney, Agent or Firm:
Eiji Saegusa (8 others)
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