PURPOSE: To enhance exposure visualizability, especially, at low exposure parts, and to prevent deterioration of exposure visualization during storage of this composition by incorporating an o-quinonediazido compound, a binder resin, a dyestuff, and a specified compound.
CONSTITUTION: This composition contains the o-quinonediazido compound, the binder resin, the dyestuff, and the compound represented by formula in which each of X and Y is H or alkyl and both are not H at the same time; A is an aryl or heterocyclic group, preferably, such as benzofuryl, benzothienyl, dibenzothienyl, benzoselenolyl, dibenzoselenolyl, carbazolyl, or the like; Z is F, Cl or Br; and m is 1, 2, or 3, preferably, 3. This compound of formula is added, preferably, in an amount of 0.01-10weight% of the composition.
AKIYAMA TAKEO
MATSUMURA TOMOYUKI
SUZUKI TOSHITSUGU
SASAKI MITSURU
KAMIMURA JIRO
MITSUBISHI CHEM IND