Title:
PHOTOSENSITIVE FILM
Document Type and Number:
Japanese Patent JP2729939
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To ensure superior sensitizing performance in a short wavelength UV region by using a specified substd. deriv. of 5-diazobarbituric acid and a film forming resin.
SOLUTION: This photosensitive film consists of a substd. deriv. of 5- diazobarbituric acid selected from among mono- and dichromophore derivs. represented by formulae I, II and a film forming resin. In the formulae I, II, each of R1 and R2 is a substituent such as 3-12C alkyl or cyclohexyl, each of R3 and R4 is a substituent such as 1-12C alkyl or cyclohexyl and R5 is a substituent such as α,ω-disubstd. 2-12C alkyl or methylenedicyclohexyl. This photosensitive film contains a sensitizer compd. as an effective component. This compd. is contained usually by about 2-30wt.% on dry basis. The remainder is an aq. alkali-soluble resin (binder) and this resin is contained usually by 65-98wt.% on dry basis.
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Inventors:
FUREDERITSUKU ROBAATO HOTSUPU
MAIKERU JEEMUSU MAKUFUARANDO
MAIKERU JEEMUSU MAKUFUARANDO
Application Number:
JP23604796A
Publication Date:
March 18, 1998
Filing Date:
September 06, 1996
Export Citation:
Assignee:
HEKISUTO SERANIIZU CORP
International Classes:
G03F7/004; C07D239/62; G03F7/039; H01L21/027; (IPC1-7): G03F7/004; C07D239/62; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Takehiko Saito
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