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Title:
PHOTOSENSITIVE POLYAMIDE COMPOSITION AND FORMATION OF PHOTOSETTING FILM
Document Type and Number:
Japanese Patent JPH05150452
Kind Code:
A
Abstract:

PURPOSE: To enable the easy formation of the photosetting film with a low exposure by uniformly dissolving photosensitive arom. polyamide and a photopolymn. initiator into an org. solvent essentially consisting of a specific polyether compd..

CONSTITUTION: The photosensitive arom. polyamide and the photopolymn. initiator are uniformly dissolved at 1 to 50wt.% concn. into the org. solvent contg. ≥50wt.% polyether compd. expressed by formula R-O-(C2H4-O-)n-R(where (n) is 3 to 4; R is a lower alkyl group). The photosensitive polyamide compsn. (soln. compsn.) is applied on a base material and the coating is dried to form the photosensitive thin film (dry film) contg. the photosensitive arom. polyamide and the photopolymn. initiator. The film is photoset by photoirradiation. The photosensitive arom. polyamide is uniformly dissolved and is not easily gelatified in such a case.


Inventors:
NAKAJIMA KOHEI
NISHIO KAZUAKI
WATANABE HIDEAKI
Application Number:
JP35608691A
Publication Date:
June 18, 1993
Filing Date:
November 29, 1991
Export Citation:
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Assignee:
UBE INDUSTRIES
International Classes:
G03F7/028; G02B5/20; G03F7/004; G03F7/038; H01L21/027; H01L21/30; (IPC1-7): G03F7/028; G03F7/038; H01L21/027



 
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