Title:
PHOTOSENSITIVE POLYMER COMPOSITION, METHOD FOR PRODUCING RELIEF PATTERN AND ELECTRONIC PARTS USING THE SAME
Document Type and Number:
Japanese Patent JP2003029409
Kind Code:
A
Abstract:
To provide a photosensitive polymer composition capable of forming a relief pattern excellent in pattern shape by development with an aqueous alkali solution without adding a dissolution inhibitor and to provide a method for producing a relief pattern and electronic parts using the same.
The photosensitive polymer composition contains (a) a polybenzoxazole precursor soluble in an aqueous alkali solution, (b) a compound which generates an acid under light and (c) a compound having one or more tertiary alcohols having a hydroxyl group on carbon bonding directly to an aromatic ring.
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Inventors:
YAMAZAKI NORIYUKI
Application Number:
JP2001220326A
Publication Date:
January 29, 2003
Filing Date:
July 19, 2001
Export Citation:
Assignee:
HITACHI CHEM DUPONT MICROSYS
International Classes:
G03F7/038; G03F7/004; G03F7/037; G03F7/40; H01L21/027; (IPC1-7): G03F7/038; G03F7/004; G03F7/037; G03F7/40; H01L21/027
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