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Title:
PHOTOSENSITIVE RESIN COMPOSITION AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2004085637
Kind Code:
A
Abstract:

To provide a negative photosensitive polyimide precursor which can be exposed to UV rays, in particular, to the i-line (at 365 nm) and which has high Tg, low α and low dielectric constant, and to provide its manufacturing method.

The photosensitive resin composition comprises: (A) a polyimide precursor expressed by general formula (1); (B) a dehydrating condensing agent for manufacturing a polyimide precursor; (C) a photosensitive agent to improve sensitivity to active rays; and (D) a solvent. In formula (1), each of R1 and R2 represents a tetravalent aromatic group or a tetravalent organic group having a plurality of aromatic rings coupled with a single bond, -O-, or the like, R3 represents a divalent aromatic group or a divalent aromatic group having a plurality of aromatic rings coupled with a single bond, -O- or the like, each of R4 and R5 represents a divalent aromatic group or a divalent aromatic group having a plurality of aromatic rings coupled with a single bond, -O-, or the like, each of R6, R7, R8 and R9 represents a monovalent organic group having one or more ethylenically unsaturated bonds, and each of m and n represents an integer of ≥1.


Inventors:
HOJO YASUHIRO
Application Number:
JP2002242758A
Publication Date:
March 18, 2004
Filing Date:
August 23, 2002
Export Citation:
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Assignee:
KYOCERA CHEM CORP
International Classes:
G03F7/027; C08G73/10; G03F7/004; G03F7/038; H01L21/027; H01L21/312; (IPC1-7): G03F7/027; C08G73/10; G03F7/004; G03F7/038; H01L21/027; H01L21/312