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Patent Searching and Data


Title:
PHOTOSENSITIVE RESIN COMPOSITION, AND METHOD OF MANUFACTURING HEAT-RESISTANT RESIN FILM
Document Type and Number:
Japanese Patent JP2010243748
Kind Code:
A
Abstract:

To provide a photosensitive resin composition hardly causing appearance defects.

The photosensitive resin composition contains (a) a polyimide resin or its precursor, (b) a quinone diazide compound, (c) a solvent and (d) a surfactant, wherein the surfactant (d) contains (d1) a silicon-based surfactant and (d2) a surfactant containing a fluorine atom, the contents X mass% and Y mass% of (d1) and (d2), respectively, in the photosensitive resin composition satisfy X>Y (Y≠0), and the whole amount of the surfactant (d) lies in a range of ≥0.005 mass% and ≤0.10 mass% in the photosensitive resin composition.


Inventors:
HARATO NAMI
MIYOSHI KAZUTO
Application Number:
JP2009091784A
Publication Date:
October 28, 2010
Filing Date:
April 06, 2009
Export Citation:
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Assignee:
TORAY INDUSTRIES
International Classes:
G03F7/004; G03F7/023; G03F7/16; H01L21/027