Title:
感光性樹脂組成物及び感光性樹脂積層体
Document Type and Number:
Japanese Patent JP6985291
Kind Code:
B2
Abstract:
Provided is a photosensitive resin laminate that is capable of ensuring high resolution and favorable line width reproducibility even when a deviation in focusing occurs during exposure. This photosensitive resin laminate is provided with a support film and a photosensitive resin composition layer that comprises a photosensitive resin composition and that is formed on said support film, wherein when a 5-mm square piece is cut out at arbitrarily-defined ten locations in the support film, the number of fine particles that have a size of not less than 1.5 μm but less than 4.5 μm and that are included in each of the pieces is 0-200 on average across the ten locations.
Inventors:
Takayuki Matsuda
Nishizawa Go
Jun Miyazaki
Nishizawa Go
Jun Miyazaki
Application Number:
JP2018555021A
Publication Date:
December 22, 2021
Filing Date:
December 05, 2017
Export Citation:
Assignee:
ASAHI KASEI KABUSHIKI KAISHA
International Classes:
G03F7/09; G03F7/004; G03F7/032; G03F7/20
Domestic Patent References:
| JP201518029A | ||||
| JP2012123394A | ||||
| JP2003345000A | ||||
| JP201237872A | ||||
| JP201148270A |
Foreign References:
| WO2017007001A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima
Shinji Mitsuhashi
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima