感光性樹脂組成物 - Asahi Kasei E-materials Co., Ltd.

Title:

感光性樹脂組成物

Document Type and Number:

Japanese Patent JP4895900

Kind Code:

B2

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Inventors:

Yoshifumi Araki
Kazuyoshi Yamazawa

Application Number:

JP2007100540A

Publication Date:

March 14, 2012

Filing Date:

April 06, 2007

Export Citation:

Assignee:

Asahi Kasei E-materials Co., Ltd.

International Classes:

G03F7/033; C08F287/00; G03F7/00; G03F7/027; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito

Previous Patent: JPS4895899

Next Patent: JPS4895901