Title:
PHYSICAL PROPERTY MEASURING DEVICE FOR SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JP3121961
Kind Code:
B2
Abstract:
PURPOSE: To measure even mobility of a carrier being a physical property, for example, of a semiconductor wafer in a noncontact condition by using two-dimensional information such as the carrier is diffused inside of the semiconductor wafer.
CONSTITUTION: A physical properly measuring device is composed of a laser 2 to radiate a pulse laser beam to a sample S4, a microwave oscillator 3 to generated a microwave, a circulator 4 to divide the generated microwave into two pieces, a mixer 9 to detect a mixed wave of one microwave of the two pieces and a reflected wave from the sample S4 of the other microwave and a phase shifter 12 to shift a phase of one microwave, and is composed of a computing element 10 to carry out operation on a change in a phase and/or an amplitude of the reflected wave of the other microwave according to a change in an imaginary number part of the mixed wave detected by the mixer 9 when the phase of one microwave is shifted and a change in a real number part of the mixed wave detected by the mixer 9 when the phase of one microwave is not shifted.
Inventors:
Takuya Kusaka
Futoshi Ojima
Futoshi Ojima
Application Number:
JP13733093A
Publication Date:
January 09, 2001
Filing Date:
June 08, 1993
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
Leo Giken Co., Ltd.
Leo Giken Co., Ltd.
International Classes:
G01N21/00; G01N22/00; H01L21/66; (IPC1-7): G01N22/00; H01L21/66
Domestic Patent References:
| JP54116176A |
Attorney, Agent or Firm:
Takeo Honjo