Title:
PHYSICAL QUANTITY SENSOR AND INERTIAL MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2022071486
Kind Code:
A
Abstract:
To provide a physical quantity sensor and an inertial measurement device that determines an abnormality in elements and applies bias voltage to be able to normalize the element.SOLUTION: A physical quantity sensor 1 comprises a determination circuit 30 that determines whether a value of a physical quantity signal is within a predetermined range continuously over a predetermined period; when it is not continuously, determines that physical quantity detection elements 6X, 6Y, 6Z are in a first state where the elements operate normally; and when it is continuously, determines that the physical quantity detection elements 6X, 6Y, 6Z are in a second state where the elements operate abnormally. The physical quantity sensor stores, in a control circuit 40, first information based on a result of determination made by the determination circuit 30 as setting information, and has a physical quantity detection circuit 3 that, when the result of determination made by the determination circuit 30 is the second state, outputs the setting information stored in the control circuit 40 to the outside from a communication unit 26.SELECTED DRAWING: Figure 2
Inventors:
YANAGISAWA YOSHINAO
Application Number:
JP2020180475A
Publication Date:
May 16, 2022
Filing Date:
October 28, 2020
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P21/00; G01P15/125
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura
Previous Patent: JPWO2022071485
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