Title:
PHYSICAL QUANTITY SENSOR MODULE AND METHOD FOR DIAGNOSING PHYSICAL QUANTITY SENSOR
Document Type and Number:
Japanese Patent JP2023111659
Kind Code:
A
Abstract:
To provide a physical quantity sensor module that can accurately conduct normal/abnormal diagnosis, and a method for diagnosing a physical quantity sensor.SOLUTION: A physical quantity sensor module has: a physical quantity sensor that detects a physical quantity based on the capacity between a movable electrode and a stationary electrode; a power supply circuit that, in a detection mode for detecting a physical quantity, applies, to the physical quantity sensor, a driving signal lower than a design pull-in voltage at which pull-in of the movable electrode occurs in design, and in a diagnostic mode for conducting diagnosis of the physical quantity sensor, applies, to the physical quantity sensor, a diagnostic signal for increasing from a first voltage lower than the design pull-in voltage to a second voltage higher than the design pull-in voltage and subsequently decreasing from a third voltage higher than the design pull-in voltage to a fourth voltage lower than the design pull-in voltage; and an output circuit that outputs the relationship between the diagnostic signal and the capacity in the diagnostic mode.SELECTED DRAWING: Figure 5
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Inventors:
YANAGISAWA YOSHINAO
Application Number:
JP2022013613A
Publication Date:
August 10, 2023
Filing Date:
January 31, 2022
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P21/00; G01P15/08; G01P15/125
Attorney, Agent or Firm:
Tatsuya Masuda
Yasuyuki Fujitani
Kazuo Asahi
Yasuyuki Fujitani
Kazuo Asahi