Title:
PIEZO-ELECTRIC ACCELERATION SENSOR AND PIEZO-ELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP3378116
Kind Code:
B2
Abstract:
PURPOSE: To provide an inexpensive piezo-electric acceleration sensor scarcely having variation in its sensitivity.
CONSTITUTION: A free vibration part and a fixed part are formed by working a dummy layer 3b of a piezo-electric element used in an acceleration sensor. A piezo-electric element is fixed directly on a circuit substrate 5 by utilizing the fixed part without preparing a separate base thereby building an acceleration sensor with a cantilever or center beam structure.
Inventors:
Koichi Okamoto
Yoshiaki Fuda
Yoshiaki Fuda
Application Number:
JP9146295A
Publication Date:
February 17, 2003
Filing Date:
March 24, 1995
Export Citation:
Assignee:
NEC Tokin Co., Ltd.
International Classes:
G01P15/09; H01L41/08; (IPC1-7): G01P15/09; H01L41/08
Domestic Patent References:
| JP5126626A | ||||
| JP6148226A | ||||
| JP7209321A | ||||
| JP390079U |