Title:
基板の音響鏡上に配置された圧電音響共振器装置、圧電音響共振器装置の製造方法および圧電音響共振器装置の使用
Document Type and Number:
Japanese Patent JP5006989
Kind Code:
B2
Abstract:
In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having lambda/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor).
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Inventors:
Dana pizza
Matthias Schreiter
Matthias Schreiter
Application Number:
JP2011514008A
Publication Date:
August 22, 2012
Filing Date:
June 15, 2009
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
H04R17/00; G01N29/02; G01N29/12; H04R31/00
Domestic Patent References:
| JP2005533265A | ||||
| JP2007074727A | ||||
| JP2007508539A | ||||
| JP2005505178A |
Attorney, Agent or Firm:
Takuya Kuno
Toshio Yano
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard
Toshio Yano
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard