Title:
PIEZOELECTRIC ACTUATOR OF INKJET PRINTER HEAD AND ITS FORMING METHOD
Document Type and Number:
Japanese Patent JP2009196376
Kind Code:
A
Abstract:
To provide a piezoelectric actuator of an inkjet printer head and its forming method.
The piezoelectric actuator has a lower electrode formed on the upper part of a vibration plate as an upper wall of a pressure chamber, a piezoelectric film formed at a position corresponding to the pressure chamber on the lower electrode with the side surface of the film substantially perpendicular to the upper surface of the lower electrode, and an upper electrode formed on the piezoelectric film to apply voltage to the piezoelectric film.
Inventors:
LIM SEUNG-MO
CHUNG JAE-WOO
LEE JAE-CHANG
CHUNG JAE-WOO
LEE JAE-CHANG
Application Number:
JP2009139666A
Publication Date:
September 03, 2009
Filing Date:
June 10, 2009
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/09; H01L41/18
Domestic Patent References:
| JPH04257446A | 1992-09-11 | |||
| JP2002370354A | 2002-12-24 |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Tetsuo Kanamoto