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Title:
圧電アクチュエータおよびその製造方法、並びに液体吐出装置
Document Type and Number:
Japanese Patent JP4593905
Kind Code:
B2
Abstract:

To provide a piezoelectric actuator having excellent reliability in electrical connection in a condition where materials of a driver and a land are different from each other, to provide its manufacturing method, and to provide a liquid discharge device.

The piezoelectric actuator 11 comprises the driver 15a and the land 15b of different materials with one of these comprising silver and the other comprising a diffusion layer of this silver which is formed at an interface between the two. The ink jet recording head (the liquid discharge device) comprises the piezoelectric actuator 11. The piezoelectric actuator 11 is obtained by printing, on a surface of a stacked sintered body, a driving pattern having Au or Pt as a main component, effecting baking to form the driver 15a, printing a land pattern having silver as a main component so as to be in contact with one end of the driver 15a, and effecting baking at 450-600°C to form the land 15b.

COPYRIGHT: (C)2005,JPO&NCIPI


Inventors:
Shin Ishikura
Application Number:
JP2003406030A
Publication Date:
December 08, 2010
Filing Date:
December 04, 2003
Export Citation:
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Assignee:
Kyocera Corporation
International Classes:
B41J2/045; H01L41/09; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/187; H01L41/22; H01L41/29; H02N2/00
Domestic Patent References:
JP10135528A
JP10284343A
JP11034321A
JP5055656A
JP5283147A
JP2000332313A
Foreign References:
WO2002073710A1
Attorney, Agent or Firm:
Toshikazu Fukai