Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
Japanese Patent JP2016039516
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric device in which the impact of external electromagnetic waves is prevented, while increase in the crystal impedance (CI) value is prevented.SOLUTION: A piezoelectric device 200 includes a piezoelectric vibration piece 120, a base 140, and a lid 210. The piezoelectric vibration piece includes a vibration part 124 where an excitation electrode 128 is formed, and a frame 122 where a lead electrode 130 is led out from the excitation electrode. The base has one principal surface to which the frame is bonded, and the other principal surface where an earth electrode 141 is formed at one corner. A metal film 212 is formed on the lid so as to cover a region facing a cavity 101. A first castellation 150a formed in the frame and a second castellation 150b formed in a region abutting against one corner of the base overlap in the height direction, the earth electrode and lead electrode do not overlap in the height direction, and the metal film is connected with the earth electrode via the first castellation 150a and second castellation.SELECTED DRAWING: Figure 10
Inventors:
ARIMICHI KO
SEKIGUCHI HIROKI
NAKATAKE YUSUKE
SEKIGUCHI HIROKI
NAKATAKE YUSUKE
Application Number:
JP2014162087A
Publication Date:
March 22, 2016
Filing Date:
August 08, 2014
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
H03H9/02; H01L23/00; H03H3/02
Domestic Patent References:
| JPH10209799A | 1998-08-07 | |||
| JP2006180437A | 2006-07-06 | |||
| JPH10209795A | 1998-08-07 | |||
| JP2013051560A | 2013-03-14 | |||
| JP2008066921A | 2008-03-21 |
Foreign References:
| US20120068579A1 | 2012-03-22 |
Attorney, Agent or Firm:
Nobukazu Ito
Previous Patent: JP2016039515
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