Title:
圧電デバイスおよびプローブ並びに電子機器および超音波画像装置
Document Type and Number:
Japanese Patent JP6606866
Kind Code:
B2
Abstract:
A piezoelectric device (57) includes: an elastic layer (58) that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body (63) that is provided on the elastic layer (58), has a first surface in contact with the elastic layer (58) and a second surface on an opposite side to the first surface, and is (100) preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode (61) provided on the second surface of the piezoelectric body (63); and a second electrode (62) that is provided on the second surface of the piezoelectric body (63) . A gap (64) is formed between the first (61) and second electrodes (62) corresponding to the orientation region in the plan view.
Inventors:
Hiroshi Miyazawa
Tetsuya Isshiki
Hiroshi Ito
Yamada Masaka
Jiro Tsuruno
Yusuke Nakamura
Tetsuya Isshiki
Hiroshi Ito
Yamada Masaka
Jiro Tsuruno
Yusuke Nakamura
Application Number:
JP2015109530A
Publication Date:
November 20, 2019
Filing Date:
May 29, 2015
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
A61B8/14; H01L41/047; H01L41/09; H01L41/113; H01L41/187; H01L41/319; H04R17/00
Domestic Patent References:
| JP2014146772A | ||||
| JP2003188433A | ||||
| JP2014194993A | ||||
| JP2014192268A |
Foreign References:
| WO2013132747A1 | ||||
| US20140292948 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka