Title:
PIEZOELECTRIC DRIVE RELAY
Document Type and Number:
Japanese Patent JP2003346626
Kind Code:
A
Abstract:
To provide a piezoelectric drive relay of low power and high speed.
The relay is provided with an elastic mode piezoelectric element (140), a switching contact structure forming a cavity (170), a first contact pad (180) lining the cavity, a second contact pad (200) bonded to the piezoelectric element, and a liquid metal (190) equipped with a first part filling the cavity and a second part adhering to the second contact pad. The piezoelectric element is extended into the cavity, and is driven to connect the first part of the liquid metal with the second contact pad and the second part of the liquid metal.
Inventors:
WONG MARVIN GLENN
Application Number:
JP2003120334A
Publication Date:
December 05, 2003
Filing Date:
April 24, 2003
Export Citation:
Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
H01L41/09; H01H1/08; H01H29/24; H01H57/00; H01H1/00; (IPC1-7): H01H57/00; H01H1/08; H01L41/09
Attorney, Agent or Firm:
Masaki Goto (1 person outside)