Title:
PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD, PIEZOELECTRIC ACTUATOR, AND INK-JET RECORDING HEAD
Document Type and Number:
Japanese Patent JP2007165553
Kind Code:
A
Abstract:
To provide an environment-friendly piezoelectric element with excellent piezoelectric characteristics.
The piezoelectric element 1 includes a substrate 2 and a piezoelectric-body film 6 at least including a piezoelectric body formed above the substrate and composed of (Na, K, Li)NbO3.
Inventors:
O SHOKO
IWASHITA SETSUYA
IWASHITA SETSUYA
Application Number:
JP2005359308A
Publication Date:
June 28, 2007
Filing Date:
December 13, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/18; H01L41/187; H01L41/22; H01L41/39; H02N2/00
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Tatsuya Ina
Takekoshi Noboru
Mitsue Obuchi
Tatsuya Ina
Takekoshi Noboru