To provide a piezoelectric element that has excellent characteristics by further increasing a lattice constant of a crystal of the perovskite-type oxide than that of a crystal of the perovskite-type oxide in a direction vertical to the lower face of a piezoelectric-body layer.
The piezoelectric element 100 includes a base body, a lower electrode formed above the base body, a piezoelectric-body layer formed above the lower electrode and made of a perovskite-type oxide, and an upper electrode formed above the piezoelectric-body layer. The piezoelectric-body layer is oriented to (100) crystal orientation in the pseudo-cubic crystal expression. A crystal 10 of the perovskite-type oxide in a direction (in an X-direction and in a Y-direction) horizontal to the lower face of the piezoelectric-body layer has lattice constants a, b larger than a lattice constant c of a crystal of the perovskite-type oxide in a direction (in a Z-direction) perpendicular to the lower face of the piezoelectric-body layer.
AOYAMA HIROSHI
KATO JIRO
OHASHI KOJI
| JP2000332569A | 2000-11-30 | |||
| JPH10223476A | 1998-08-21 | |||
| JP2006114562A | 2006-04-27 |
| US20070048190A1 | 2007-03-01 |
Mitsue Obuchi
Misa Nagata