Title:
PIEZOELECTRIC ELEMENT, ULTRASONIC PROBE, ULTRASONIC MEASURING DEVICE AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2017092097
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique capable of improving the conversion efficiency of piezoelectric element when converting an electricity into a physical movement.SOLUTION: The piezoelectric element includes: a piezoelectric body; and a diaphragm which uses an anisotropic single crystal silicon which has an azimuth with relatively higher Young's modulus and a lower azimuth (referred to as low Young's modulus azimuth) as a vibration material. In the piezoelectric element, the piezoelectric body and the diaphragm are laminated so that the low Young's modulus azimuth is aligned in a direction along the high expansion and contraction direction (referred to as high expansion and contraction direction) in the directions where the degree of relative expansion and contraction is high and in the low direction, which is generated depending on the support structure of the piezoelectric body.SELECTED DRAWING: Figure 8
Inventors:
YAMAZAKI SEIKA
TAMURA HIROAKI
TAMURA HIROAKI
Application Number:
JP2015216383A
Publication Date:
May 25, 2017
Filing Date:
November 04, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; A61B8/00; H01L41/113; H04R17/00; H04R31/00
Domestic Patent References:
| JP2013078877A | 2013-05-02 | |||
| JP2014102355A | 2014-06-05 | |||
| JP2012237673A | 2012-12-06 | |||
| JP2015162813A | 2015-09-07 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai
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