Title:
PIEZOELECTRIC FILM, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC PUMP, INK-JET RECORDING HEAD, INK-JET PRINTER, SURFACE ACOUSTIC WAVE ELEMENT, THIN FILM PIEZOELECTRIC RESONATOR, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2005150694
Kind Code:
A
Abstract:
To provide a piezoelectric film having good piezoelectric characteristics.
The piezoelectric film 5 is represented by the general formula:A1-bB1-aXaO3. A contains Pb. B is constituted of at least one of Zr and Ti. X is constituted of at least one of V, Nb, Ta, Cr, Mo, and W. And a is in the range of 0.05≤a≤0.3, and b is in the range of 0.025≤b≤0.15.
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Inventors:
MIYAZAWA HIROSHI
KIJIMA TAKESHI
NATORI EIJI
AOYAMA HIROSHI
IWASHITA SETSUYA
HIGUCHI AMAMITSU
KIJIMA TAKESHI
NATORI EIJI
AOYAMA HIROSHI
IWASHITA SETSUYA
HIGUCHI AMAMITSU
Application Number:
JP2004277859A
Publication Date:
June 09, 2005
Filing Date:
September 24, 2004
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; C04B35/49; F04B9/00; F04B43/04; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/319; H01L41/39; H02N2/00; H03B5/30; H03H9/02; H03H9/05; H03H9/145; H03H9/17; H03H9/25; H03H9/64; (IPC1-7): H01L41/187; B41J2/045; B41J2/055; B41J2/16; C04B35/49; F04B9/00; H01L41/09; H01L41/22; H01L41/24; H02N2/00; H03B5/30; H03H9/145; H03H9/17; H03H9/25
Domestic Patent References:
| JPH09295864A | 1997-11-18 | |||
| JPH05319926A | 1993-12-03 | |||
| JP2003163176A | 2003-06-06 | |||
| JPH08198672A | 1996-08-06 | |||
| JPH04295051A | 1992-10-20 | |||
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| JP2004128492A | 2004-04-22 |
Other References:
宮澤 弘 HIROMU MIYAZAWA: "第一原理計算によるＰＺＴＮ系の電子状態に関する考察 First-principles study on electronic structure o", ２００３年（平成１５年）秋季 第６４回応用物理学会学術講演会講演予稿集 第２分冊 EXTENDED ABSTRACTS, vol. 第2巻, JPN6010053568, 30 August 2003 (2003-08-30), JP, pages 501, ISSN: 0001726680
青山 拓 T. AOYAMA: "ＰＺＴＮ薄膜の結晶構造解析 Analyzed Crystal Structure of PZTN Thin Film", ２００３年（平成１５年）秋季 第６４回応用物理学会学術講演会講演予稿集 第２分冊 EXTENDED ABSTRACTS, vol. 第2巻, JPN6010053569, 30 August 2003 (2003-08-30), JP, pages 501, ISSN: 0001726681
T.HACCART,ET AL: "Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr,Ti)O3 thin fil", APPLIED PHYSICS LETTERS, vol. 76, no. 22, JPN6010035841, 29 May 2000 (2000-05-29), US, pages 3292 - 3294, XP012025447, ISSN: 0001656114, DOI: 10.1063/1.126610
K.W.KWOK,ET AL: "Effects of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate", JOURNAL OF APPLIED PHYSICS, vol. 95, no. 3, JPN6010035843, 1 February 2004 (2004-02-01), US, pages 1372 - 1376, XP012067296, ISSN: 0001656115, DOI: 10.1063/1.1635968
E.JIMENEZ, ET AL: "In-situ plasma emission optical spectroscopy during pulsed laser ablation deposition of PZTN thin fi", VACUUM, vol. 64, JPN6010053567, 2002, pages 353 - 358, ISSN: 0001726682
青山 拓 T. AOYAMA: "ＰＺＴＮ薄膜の結晶構造解析 Analyzed Crystal Structure of PZTN Thin Film", ２００３年（平成１５年）秋季 第６４回応用物理学会学術講演会講演予稿集 第２分冊 EXTENDED ABSTRACTS, vol. 第2巻, JPN6010053569, 30 August 2003 (2003-08-30), JP, pages 501, ISSN: 0001726681
T.HACCART,ET AL: "Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr,Ti)O3 thin fil", APPLIED PHYSICS LETTERS, vol. 76, no. 22, JPN6010035841, 29 May 2000 (2000-05-29), US, pages 3292 - 3294, XP012025447, ISSN: 0001656114, DOI: 10.1063/1.126610
K.W.KWOK,ET AL: "Effects of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate", JOURNAL OF APPLIED PHYSICS, vol. 95, no. 3, JPN6010035843, 1 February 2004 (2004-02-01), US, pages 1372 - 1376, XP012067296, ISSN: 0001656115, DOI: 10.1063/1.1635968
E.JIMENEZ, ET AL: "In-situ plasma emission optical spectroscopy during pulsed laser ablation deposition of PZTN thin fi", VACUUM, vol. 64, JPN6010053567, 2002, pages 353 - 358, ISSN: 0001726682
Attorney, Agent or Firm:
Inoue Ichi
Yukio Fuse
Mitsue Obuchi
Yukio Fuse
Mitsue Obuchi