Title:
圧電体膜の成膜方法、圧電素子、液体吐出装置、及び圧電型超音波振動子
Document Type and Number:
Japanese Patent JP5449970
Kind Code:
B2
Abstract:
To deposit a piezoelectric film composed of a lead-containing perovskite type oxide having excellent piezoelectric characteristics and driving durability by a simple method.
In the film deposition method of a piezoelectric film composed of a lead-containing perovskite type oxide, the electric potential of a substrate is changed from a first substrate electric potential Vsub1 to a second substrate electric potential Vsub2 to obtain the desired lead composition of the piezoelectric film in the film deposition by the sputtering method.
COPYRIGHT: (C)2011,JPO&INPIT
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Inventors:
Takayuki Naono
Shinkawa Takami
Takamitsu Fujii
Shinkawa Takami
Takamitsu Fujii
Application Number:
JP2009235257A
Publication Date:
March 19, 2014
Filing Date:
October 09, 2009
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
C23C14/34; B41J2/14; B41J2/16; H01L21/8246; H01L27/105; H01L41/09; H01L41/18; H01L41/22; H01L41/316; H01L41/319; H01L41/39
Domestic Patent References:
| JP2005244174A | ||||
| JP6021337A | ||||
| JP10313092A | ||||
| JP2009062207A |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma