Title:
PIEZOELECTRIC FILM INTEGRATED DEVICE, MANUFACTURING METHOD THEREOF, AND ACOUSTIC OSCILLATION SENSOR
Document Type and Number:
Japanese Patent JP2023148096
Kind Code:
A
Abstract:
To improve the performance of a piezoelectric film integrated device by providing two or more types of monocrystalline piezoelectric films on the same substrate.SOLUTION: A piezoelectric film integrated device (100) includes: a substrate (33); an electrode (34) provided on the substrate (33); a first piezoelectric element that is provided on the electrode (34) and that includes a first monocrystalline piezoelectric film (25 or 15) and a first electrode film (26 or 16) superimposed on the first monocrystalline piezoelectric film; and a second piezoelectric element that is provided on the first piezoelectric element and that includes a second monocrystalline piezoelectric film (15 or 25) and a second electrode film (16 or 26) superimposed on the second monocrystalline piezoelectric film.SELECTED DRAWING: Figure 1
Inventors:
FURUTA HIRONORI
KOSAKE TATSU
SUZUKI TAKAHITO
TANIGAWA KENICHI
ISHIKAWA TAKUMA
KITAJIMA YOSHITAKA
KONISHI AKIO
KANAMORI HIROAKI
IIZUKA TAKESHI
KOSAKE TATSU
SUZUKI TAKAHITO
TANIGAWA KENICHI
ISHIKAWA TAKUMA
KITAJIMA YOSHITAKA
KONISHI AKIO
KANAMORI HIROAKI
IIZUKA TAKESHI
Application Number:
JP2022055955A
Publication Date:
October 13, 2023
Filing Date:
March 30, 2022
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
I PEX PIEZO SOLUTIONS CO LTD
I PEX PIEZO SOLUTIONS CO LTD
International Classes:
H10N30/072; H04R17/00; H04R17/02; H04R31/00; H10N30/076; H10N30/079; H10N30/30; H10N30/50; H10N30/853
Attorney, Agent or Firm:
Yoichi Yamagata
Masaru Sato
Masahiko Shinohara
Junichi Handa
Masaru Sato
Masahiko Shinohara
Junichi Handa