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Patent Searching and Data


Title:
PIEZOELECTRIC FINE ADJUSTMENT MECHANISM
Document Type and Number:
Japanese Patent JPH11259133
Kind Code:
A
Abstract:

To provide a piezoelectric fine adjustment mechanism having high resonance frequency without using high driving voltage while obtaining the same quantity of Z-axis direction displacement as conventional by obtained.

A tube scanner 10 has a hollow-cylindrical piezoelectric ceramic component 1, and a Z-axis external electrode 2a surrounding the ceramic component 1 and four slip-like driving electrodes 3a, 4a, 3b, 4b arranged at an interval in the peripheral direction of the component 1 are formed in the outside of the component 1. A Z-axis inner electrode 2b surrounding the inside of the component 1 and an electrode 5 common for XY axes surrounding the inside are formed on the inside. The electrode 2b is opposed to the electrode 2a through the component 1 and the electrode 5 is opposed to the X-axis driving electrodes 3a, 3b and the Y-axis driving electrodes 4a, 4b through the component 1. Voltage elements having mutually reverse polarity are respectively impressed to the electrodes 2a, 2b, and the scanner 10 is displaced in the Z-axis direction in accordance with the voltage applied.


Inventors:
OKAZAKI MASAYA
Application Number:
JP6270898A
Publication Date:
September 24, 1999
Filing Date:
March 13, 1998
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
H01L41/09; G01B21/30; G01N37/00; G01Q10/04; G01Q90/00; G05D3/00; (IPC1-7): G05D3/00; G01B21/30; G01N37/00; H01L41/09
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)