Title:
PIEZOELECTRIC THIN FILM ELEMENT, INK JET HEAD USING THE SAME, AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM
Document Type and Number:
Japanese Patent JP2002307690
Kind Code:
A
Abstract:
To provide a piezoelectric thin film element using a piezoelectric material having large piezoelectric constant, and having a large deflection amount.
There is provided the piezoelectric thin film element 1 which has on a substrate 2 at least a diaphragm 3, a lower electrode 4, a piezoelectric thin film 5 having a perovskite type crystal structure, and a chemical composition of xPb(AαNbβ)O3+yPbZrO3+zPbTiO3. An upper electrode 6 in which A is at least one kind of element selected from a group of magnesium, nickel and zinc, 1/6<α<1/2, α+β=1, and x, y and z are mole ratios which satisfy x+y+z=1.
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Inventors:
JINNO ISAKU
KAMATA TAKESHI
TORII HIDEO
KAMATA TAKESHI
TORII HIDEO
Application Number:
JP2001110957A
Publication Date:
October 23, 2002
Filing Date:
April 10, 2001
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B41J2/16; B41J2/045; B41J2/055; B41J2/135; B41J2/14; C23C14/08; H01L41/09; H01L41/187; H01L41/22; H01L41/29; H01L41/316; H01L41/43; (IPC1-7): B41J2/16; B41J2/045; B41J2/055; C23C14/08; H01L41/09; H01L41/187; H01L41/22
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)
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