Title:
圧電薄膜素子及びそれを用いたセンサ並びにアクチュエータ
Document Type and Number:
Japanese Patent JP5267082
Kind Code:
B2
Abstract:
A sensor for detecting a physical quantity includes a piezoelectric thin film device having a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K1-xNax)NbO3 (0
Inventors:
Kenji Shibata
Fumito Oka
Fumito Oka
Application Number:
JP2008306575A
Publication Date:
August 21, 2013
Filing Date:
December 01, 2008
Export Citation:
Assignee:
Hitachi Cable Ltd.
International Classes:
H01L41/09; G01C19/56; G01C19/5656; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/39
Domestic Patent References:
| JP2007019302A | ||||
| JP2006291332A | ||||
| JP2009049355A |
Attorney, Agent or Firm:
Hiroshi Okikawa