Title:
圧電薄膜共振器およびその製造方法、フィルタ並びにマルチプレクサ
Document Type and Number:
Japanese Patent JP6869831
Kind Code:
B2
Abstract:
A piezoelectric thin film resonator includes: a substrate; lower and upper electrodes located on the substrate; a piezoelectric film that has a lower piezoelectric film mainly composed of aluminum nitride and an upper piezoelectric film mainly composed of aluminum nitride, the lower piezoelectric film and the upper piezoelectric film being in contact with each other in at least a part of a resonance region where the lower electrode and the upper electrode face each other across at least a part of the piezoelectric film, and a fluorine concentration at a boundary face with which the lower piezoelectric film and the upper piezoelectric film are in contact being 0.03 atomic % or less; and an insulating film that is located between the lower piezoelectric film and the upper piezoelectric film in a region other than the at least a part of the resonance region and contains silicon oxide.
Inventors:
Shinji Taniguchi
Hiroomi Kaneko
Dr. Kawakami
Tokihiro Nishihara
Hiroomi Kaneko
Dr. Kawakami
Tokihiro Nishihara
Application Number:
JP2017130356A
Publication Date:
May 12, 2021
Filing Date:
July 03, 2017
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H3/02; H03H9/17; H03H9/54
Domestic Patent References:
| JP2015119249A | ||||
| JP2014161001A |
Attorney, Agent or Firm:
Shuhei Katayama